The Kratos Dual Anode X-Ray Source
The Kratos XSAM is equipped with two x-ray sources. The first is a dual anode x-ray source equipped with both a Magnesium anode and an Aluminum anode. The charicteristic x-rays produces by these anodes is as follows:
| X-Ray Line | Photon Energy | FWHM |
| Mg Ka | 1253.6 eV | 0.7 eV |
| Al Ka | 1486.6 eV | 1.0 eV |
Below are two XPS spectra of a reduced silicon wafer. The noisy spectra was taken by the Kratos XSAM 800
prior to the instillation of the new detector. The total dwell time for each data point in the noisy spectra
was 0.6 seconds or in other words, 11 minutes. The spectra with the lower signal to
noise ratio was taken with the new
detector. The total dwell time for each data point was 0.1 second. or 1.8 minutes.
The Kratos Monochromatic X-Ray Source
The second x-ray source is a Kratos monochromatic x-ray source. The Monochromatic source allows for elimination of x-ray satalite peaks due to the lower energy x-ray lines prese
nt in non-monochromatic aluminum and magnesium x-ray spectra. The reported characteristics of the monochromatic x-ray source are shown below.
| X-Ray Line | Photon Energy | FWHM |
| Al Ka | 1486.6 eV | 0.3 eV |
The use of the monochromatic x-ray source also allows for better energy resolution of peaks. Full Width Half Maximums have been measured to 0.7 eV with minimal tuning. Better resolution may be possible. The spectra below of the Ag 3d region was take n with the monochrometer. The total aquisition time was 10 minutes, and the FWHM is 0.65 eV. It should be noted, this spectra was taken with out any attemps to clean the surface (ie: ion etching). This has a negative affect on the signal to noise ratio and the ultimate resolution.
The image below is the separation of the Si 2p 1/2 and the Si 2p 3/2 peaks. The spin orbital splitting of these peaks is reported to be 0.?? eV. (?0.64?)
