The Sub-Micron Gun
The 10 Kev sub-micron gun, from Kratos Analytical, produces a finely focussed beam of up to 10 KeV electrons. These high energy electrons produce secondary and Auger electrons which are emmitted by the sample and analysed by the 180 degree hemispherical analyser. Peaks in a plot of electron intensity versus kinetic energy resulting from Auger electrons are used to determine the elemental composition of the surface.
Becuase Auger analysis utilizes the 10 KeV Sub-Micron Electron Gun, analysis of materials can be performed on a spot of less then 1 micron in diameter. By using Auger analysis in conjuction with Secondary Electron Microscopy, elemental compositions of spacific surface features can be determined, as shown can be shown by in the following examples:
Click on the thumbnail images for more info into the chemical makeup of the features on the sample.