Spot Auger Electron Spectroscopy


Figure 1


The SEM image, shown above in Figure 1, is of a nickle grid which contains the letters of the alphabet. The grid is mounted to the sample stub with a piece of conducting carbon tape. Analysis of sample at point 1, shown below in figure 2, shows a near perfect nickle Auger Electron Spectrum. The spectrum shows three nickel KLL peaks between Between 650 eV and 900 eV, and the nickel LMM peak at 60 eV. The spectrum also shows a small amount of carbon at 275 eV and oxygen at 510 eV. The carbon are most likely from adventitious carbon which was not completely removed during cleaning by argon ion etching.

Figure 2


Figure 3, shown below, the Auger electron spectrum taken at point 2 from the SEM image above in Figure 1. This spectrum shows that carbon (275 eV) and oxygen (510 eV) are the only elements present at that spot on the surface.

Figure 3