Nanoelectronics Laboratory



The Nanoelectronics Laboratory is equipped for dc and wideband ac measurements of devices and circuits. The laboratory houses an Agilent 8510XF Network Analyzer for S-parameter measurements from 45 MHz to 110 GHz. On-wafer probing is provided via a Cascade Summit probe station using 1 mm coax-to-coplanar probes with dc to 100 GHz bandwidth. Also available is an Anritsu 3680V Universal Test Fixture for providing dc to 60 GHz coax-to-microstrip or coax-to-coplanar transmission line connections to semiconductors and ceramic substrates. In 2001, an NSF Major Research Instrumentation grant provided equipment for precision current-voltage (Agilent 4155B semiconductor parameter analyzer) and impedance measurements (Agilent 4294A precision impedance analyzer) from 40 Hz to 110 MHz, 300 mW to 500 MW, with triaxially-guarded cabling and low current and voltage resolution (10 fA and 2 µV). Samples are connected using a Summit 11861 variable-temperature (-65 to 200 °C) probe station consisting of a nitrogen enclosed wafer chuck capable of handling 200 mm semiconductor wafers to sub-centimeter-sized substrates. The Agilent 4294A also has the 16452 impedance/ permitivity fixture for the dielectric spectroscopy of fluids and the 16451B fixture for spectroscopy of solid dielectrics. A Tektronix 370 Curve Tracer has capability for precision measurement of current-voltage characteristics up to 220 W with 1 nA and 2 mV resolution. In 2000, the Intel Corporation donated five 933 MHz Pentium III workstations to the laboratory.




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